Technics Hummer V Sputter Coater
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This tool is no longer at the space. Back to list of Equipment |
Configuration
- Sputter coater with Au/Pd target
- Carbon arc attachment for carbon deposition
Status
- The sputter coater was donated along with all related equipment for the SEM to a science based makerspace The Analytics Lounge, NFP.
- Their website is http://www.analyticslounge.org/
List of Currently Certified Users
Qualified Member | Trained By |
---|---|
Ryan Pierce | Ryan Pierce |
Documentation
Manual scans for the sputter coater are available, as is a manual for a similar but not identical model of the carbon arc deposition system. A location to drop them is needed.
The manufacturer was purchased by Anatech USA and they still support this product.
Maintenance Log
Date | Maintainer | Description |
---|---|---|
11/24/2013 | Ryan Pierce and Fitterdave | Removed flow gauge from argon regulator. It was leaking, and we suspect this was because it was designed to handle far lower pressures than even the 5 PSI currently I had been using. |
11/9/2013 | Ryan Pierce | Replaced oil with high vacuum oil that came with the SEM. Note that Fitterdave changed out a gasket on the argon flow meter, but it still has a leak as tested by Ryan. Also put panels back on. |
1?/?/2013 | Ryan Pierce | Replaced HV power supply with one shipped from the manufacturer as a former refurb. New power supply works. A plasma can be maintained by adjusting gas pressure. It is definitely sputter coating. Also replaced power cord. (Note: it uses a standard extension cord. Borrowed one but it is a bit long.) |
7/21/2013 | Ryan Pierce | Tried using this after cleaning. Vacuum could only get down to 30-40 millitorr. The power supply seemed to need excessive amperage just to maintain a plasma, and that was with low voltage. Then something inside the power supply exploded with a burning smell. |
4/?/2013 | Steve Finkelman | Full cleaning of chamber. |